Police took up the chase when the Mercedes A-Class sped through a police checkpoint on the Autobahn near Stuttgart at around 2 in the morning, Spiegel reports.
Shortly before the turn-off to the airport, the car turned off onto a smaller road where the driver entered a lay-by at high speed.
There were already several cars in the parking area and the luxury car collided with a car transporter which was parked there at a speed of around 100 km/h.
The driver and two passengers all died in the collision. Police have not yet managed to identify the victims or their reasons for fleeing police.